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ProScan H105E2F


Encoded Motorized Flat Top 6-inch Travel Stage For Upright Microscopy

The ProScan H105E2F is an encoded motorized XY flat-top stage designed for upright industrial microscopy

It is fully customizable for integration into OEM devices, but also mounts directly onto Nikon industrial microscopes and the Prior OpenStand-L platform. See the product compatibility tab for details.

The H105E2F is optimized for scanning 6-inch semiconductor wafers and other industrial samples.

With linear encoders and Prior's patented Intelligent Scanning Technology (IST) to enhance long-range repeatability, accuracy, and linearity it reliably locates specific regions. The 2 mm ballscrew enables it to cover the large surface area quickly for fast, efficient scanning.    

Its flat top plate allows easy access to the sample for loading and ensures compatibility with a wide range of optics

It is compatible with Nikon NIS Elements software (appropriate package required).

This is an ‘OEM & Batch Order’ product. For more information visit our FAQs section.


    • Easy to integrate into customized imaging solutions
    • Directly compatible with Nikon industrial microscopes and software
    • Aesthetic and user friendly flat top design
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Embedded linear encoders for closed loop positional control
Travel range 154 mm x 154 mm
Uni-directional repeatability < 0.6 µm
Bidirectional repeatability < 0.9 μm
Metric accuracy <0.12 μm/mm
Full travel metric accuracy < 12.8 μm
Resolution 0.1 μm
Squareness 25 arcsec
Maximum velocity 40 mm/s
Maximum load 10 kg
Encoders 0.1 μm linear encoders
Motor type 200 step
Screw pitch 2 mm
Weight 4.8 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes

H105E2F

Prior OpenStand-L
H105E2F Nikon L200N, L200ND, L300N, L300ND

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