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ProScan H105NL/2


Motorized 6-inch Travel Stage for Nikon LV100 and LV150 Microscopes

The ProScan H105NL/2 motorized XY stage provides 154 x 154 mm XY travel for Nikon LV100 and LV150 upright microscopes.  

It is optimized for scanning 6-inch semiconductor wafers and other industrial samples. This travel range and high-precision motorized control are normally only available on larger systems. 
 
The H105NL/2 features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. 

The stage is compatible with Nikon NIS software (appropriate package required). 
 
Several dedicated industrial sample holders are available: see the accessories tab for the full list.


    • Directly compatible with Nikon LV100/LV150 and software
    • Travel range supports 6-inch wafers on small industrial microscopes
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Additional clearance simplifies integration into OpenStand and other customized imaging systems
    • Excellent combination of speed and accuracy
Travel range 154 mm x 154 mm
Uni-directional repeatability < 0.7 µm
Bidirectional repeatability < 2.7 μm
Metric accuracy 0.17 µm/mm
Full travel metric accuracy < 25 μm
Resolution 0.04 μm
Squareness < 45 arcsec
Maximum velocity 60 mm/s
Maximum load 10 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 5 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes

H105NL/2

Prior OpenStand-U
H105NL/2 Nikon LV100ND, LV100NDA, LV150N, LV150NA

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