Main Image

ProScan H112/2ST


Motorized 12-inch Travel Stage For Upright Microscopy

The ProScan H112/2ST motorized XY stage is compatible with Nikon and Evident/Olympus upright industrial microscopes, Prior's OpenStand-L platform, and is easily integrated into custom microscopes. 

Designed for scanning large, heavy samples such as 12-inch semiconductor wafers, flat panel displays, and printed circuit boards, it offers the longest travel range of any of Prior's XY stages. It is compatible with transmitted light applications. 

The H112/2ST features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed.

This stage is compatible with Nikon NIS Elements, Olympus Stream Motion and Evident PRECiV software (appropriate package required).


    • Directly compatible with Nikon and Evident/Olympus industrial microscopes and software
    • Lightweight and slim design facilitates integration
    • 12-inch travel range for semiconductor applications
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
Travel range 302 mm x 302 mm
Uni-directional repeatability < 1.4 μm
Bidirectional repeatability < 4.1 μm
Metric accuracy 0.20 μm/mm
Full travel metric accuracy < 60.0 μm
Resolution 0.04 µm
Squareness < 55 arcsec
Maximum velocity 60 mm/s
Maximum load 25 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 13 kg

Specifications as per datasheet. Please see datasheet for details.

  • H221 Glass plate (not suitable for transmitted light microscopy).

  • H233 Aluminum plate (H112)

  • H233B Aluminum plate (H112) with M4 and M6 tapped holes.

  • HWC30S Wafer chuck, rotatable with steps for 200 mm & 300 mm wafers.

  • HWC30V Wafer chuck, rotatable with steps for 300 mm wafers.

Option Manufacturer Compatibility Notes
H112/2ST Evident/Olympus MX61L, MX63L
H112/2ST Nikon L300N, L300ND Requires travel range reduction. Please contact Prior Scientific.

H112/2ST

Prior OpenStand-L

想要了解关于我们系统、服务和组件的更多信息吗?

我已仔细阅读隐私政策并乐意接受后续联系