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ProScan H116/2


Motorized 8-inch Travel Stage for Upright Microscopy

The ProScan H116/2 motorized XY stage for upright industrial microscopy is compatible with Prior's OpenStand-L platform and is fully customizable. 

It has a long travel range and 25 kg load capacity for scanning large heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter

The H116/2 features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans large industrial samples reliably and efficiently.

Other drive configurations for increased speed may be available depending on your region. 

It is compatible with transmitted light applications and provides easy access for loading samples.


    • Easy to integrate into customized imaging solutions
    • Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
    • Slim design with 25 kg load capacity
    • Excellent combination of speed and accuracy
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
Travel range 255 mm x 215 mm
Unidirectional repeatability < 0.6 μm
Bidirectional repeatability < 3.0 μm
Metric accuracy 0.14 μm/mm
Full travel metric accuracy < 30.9 μm
Resolution 0.04 µm
Squareness < 45 arcsec
Maximum velocity 60 mm/s
Maximum load 25 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 8 kg

Specifications as per datasheet. Please see datasheet for details.

  • H225 Glass plate (not suitable for transmitted light microscopy)

  • H232 Aluminum plate (H116)

  • H232B Aluminum plate (H116) with M4 and M6 tapped holes

  • HWC20S Wafer chuck, rotatable with steps for 150 mm & 200 mm wafers

  • HWC20V Wafer chuck, rotatable for vacuum for 200 mm wafers

Option Manufacturer Compatibility Notes

H116/2

Prior OpenStand-L

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